Choosing the appropriate source for your system can be confusing. Use the resources below to get the data you need to make an informed decision. If you're still not sure or you need customization, reach out to our team at

Data Sheets & Manuals


Technical Notes


Laser-Driven Light Sources

LDLS® Selection Guide | LDLS® Product Catalog
EQ-99X Data Sheet | Manual
EQ-99X-FC Data Sheet | Manual
EQ-99X-FC Fiber Optic Cable Data Sheet
EQ-99X-CAL Data Sheet
EQ-99 Manager Data Sheet | Manual
EQ-77 Data Sheet | Manual
EQ-77X Data Sheet | Manual
EQ-9 Data Sheet | Manual
EQ-9-HP Manual
EQ-400 Data Sheet | Manual


Extreme UV / Soft X-Ray

EUV Selection Guide
EQ-10R Data Sheet 
EQ-10R-HP Data Sheet 
EQ-10R-SXR Data Sheet


Laser-Driven Tunable Light Sources

LDTLS® Selection Guide
TLS-EQ-77-S Data Sheet | Manual
TLS-EQ-77-NIR Data Sheet | Manual
Data Sheet | Manual
Data Sheet | Manual

TLS Software Driver

Chromatiq Spectral Engine™

CSE-EQ-99-VIS Data Sheet | Manual | Software

CSE-EQ-99-VIS-NIR Data Sheet | Manual | Software

Understanding Radiance (Brightness), Irradiance and Radiant Flux

Operation of Laser-Driven Light Sources below 300 nm: Ozone Mitigation

Etendue and Optical Throughput Calculations

Application Notes


LDLS-Powered Broadband Tunable Light Source for the Application of Diamond Inspection

Instrumentation for Wavelength Calibration

Innovative Light Sources for Endoscopic Procedures

Laser-Driven Light Source (LDLS®) Enables Improved Trace-Level Gas Measurements

Advanced Illumination for Biological Hyperspectral Imaging

Laser-Driven Light Sources (LDLS®) for Material Science Applications

Laser-Driven Light Source (LDLS®) for Calibration

Ambient Light Sensor Calibration with Tunable Light Sources

Virus and Bacteria Deactivation Research with Energetiq Tunable Light Sources

LDLS-Powered Tunable Light Source with Far-UVC Output

Laser-Driven Light Sources (LDLS®) for Ellipsometry



Review the basics of Laser-Driven Light Sources, their operation, and how these elements are used in Energetiq's LDLS.
The Electrodeless Z-Pinch EUV Source is a reliable and stable source of EUV photons and is being operated in the field 24/7 with consistent operation over many years.
Our headquarters in Massachusetts is home to collaboration and a culture of innovation with streamlined logistics and clean manufacturing areas and R&D laboratories.


Laser-Driven Light Sources

Photonic Frontiers: LEDs and other Light Sources: Looking Back/Looking Forward: More than lasers: LEDs, lamps, and other non-laser sources

SPECTROSCOPY: LDLS™ sheds light on analytical-sciences applications

Energetiq Technology Inc.: From Semi Fab to Bio Lab

NOVEL LASERS: Broadband laser-driven plasma source spans nearly 2000 nm

Energetiq Brings Deep Ultraviolet to Life

Extreme Ultraviolet/Soft X-Ray

Affordable X-Ray Microscopy with Nanoscale Resolution

Infrastructure Steps Closer to EUV Lithography

Papers & Posters


Below are some of our most recent published papers. To view our full collection of papers, check out our archive.

Type Title Authors Product Keywords
David Reisman, Kosuke Saito, Wolfram Neff
Electrodeless Z-Pinch, Metrology, EUV Light Sources, EUV Lithography, Xenon Plasma, Semiconductor
Yuxing Chen, Cauyuan Wang, Limin Xiao
Optical Fibers, Lenses, Bandwith, Silicon Compounds, Beam Collimation, Lensed Optical Fiber, Optical Coupling, Photonic Crystal Fiber
Joanna Bucynska, Agnieszka Gajewska, Aleksander Gorski, Barbara Goolec, Krzysztof Nawara, Renata Rybakiewicz, Jacek Waluk
Photostability, Photobleaching, Porphyrins, Self Healing Flourphores
Yurina Nishi, Ryosuke Wantabe, Subaru Sasaki, Akihiro Okada, Keisuke Seto, Takayoshi Kobayashi, Eiji Tokunaga
Pockels effect, Surface Plasmon Polarition, Water, Interface, Electric Double Layer, Electromodulation Spectroscopy, Silber, Penetration Depth, Attenuated Total Reflection, Optical Modulation
Ying Chen
LDLS, EQ-1500
WS2 Flakes, Tungstic Acid, Chemical Vapor Deposition, Photodetectors
Jake Hardy, Mattew W. Brett, Aurelien Rossi, Isabella Wagner, Kai Chen, Mattie S. M. Timmer, Bridget L. Stocker, Michael B. Price, Nathaniel J. L. K. Davis
Hydrocarbons, Energy Transfer, Absorption, Ligands, Aromatic Compounds

Any questions?

Simply contact our team. Our experts will help you choose the right light source or talk through customizations, so you’re equipped with the right system for your application. 

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