Electrodeless Z-Pinch™
Soft X-Ray Source


Harness Soft X-Ray Technology

Other than in synchrotron facilities, soft x-rays (SXR) are difficult to produce. Now, soft x-rays are readily available for any research laboratory at flux levels suitable for imaging and microprobing.

The Energetiq EQ-10R- SXR is a compact, easy-to-use, reliable and cost-effective SXR light source system, based on Energetiq’s unique Electrodeless Z-Pinch™ technology using Nitrogen gas.

The EQ-10R-SXR source comprises a 19" rack containing the gas subsystems, power delivery subsystem, and control electronics; the Electrodeless Z-Pinch™ source assembly with its integrated vacuum pumping; and a high efficiency pulse modulator. This modular design allows easy integration to the microscope or other applications equipment.

The EQ-10R-SXR is capable of delivering up to 400 milliwatts of 2.8 nm power into 2pi steradians and will run continuously at pulse repetition rates of up to 2 kHz. It's easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air, and a supply of high purity Nitrogen.


Patented electrodeless design
Low debris / low consumable cost

2-20 nm Soft X-Rays, gas dependent
Enables tabletop SXR microscope applications

Small plasma size
<1mm diameter for high brightness

Cost-effective and compact
Low cost per SXR Watt
Small footprint


Semiconductor Metrology

Water-Window Microscopy

Electrodeless Z-Pinch™ Technology

Clean Operation, Small Plasma Size, and Maximum Flexibility

  • Clean operation with no electrode debris and magnetically confined plasma
  • Unmatched spatial stability
  • Lower cost and complexity
  • Flexible, adjustable operating conditions
  • Optimized for peak power or peak brightness
  • Small plasma size (typically below 1mm in diameter)
  • Simple, flexible, customizable optical interface with color touch screen display
  • Manual and automatic operation

*Patent Numbers:
US 7,307,375 -- US 7,948,185 -- DE 1774838 -- DE 2187711 -- GB 1774838 -- GB 2187711 -- JP 5179175 -- KR 10-1173324
NL 1774838 -- NL 2187711 -- US 8,143,790 -- US 7,199,384 -- US 7,183,717 -- US 7,569,791 -- US 8,019,043


Let's talk about your next project.

Our team is ready to collaborate with you and find solutions to the challenges of high brightness, high throughput, and reliable performance in your complex systems.

Let's Collaborate