Ultra-High Radiance, Broadband Laser-Driven Light Source

Based on the highly successful Laser-Driven Light Source (LDLS) technology, the EQ-400 offers the highest radiance and irradiance available in a truly broadband white light source. The EQ-400 features a compact lamp house, with clean construction that ensures long life and ultimate stability. With a 170nm-2100nm wavelength range, and a choice of source dual-beam output or a single-beam output with retro-reflector, the EQ-400 is flexible for a broad variety of applications.

Features  &  Benefits

  • Radiance >100mW/mm2.sr.nm
      - Fastest measurements
  • Very low noise and excellent spatial stability
      - Precise & repeatable results
  • Dual beam output or higher-output Single-beam (using integrated Retro-reflector) for flexibility
      - For optical flexibility
  • Compact lamphouse with water-cooling and clean construction
       - Long life and stability
  • Extreme high brightness across broad spectrum
       - UV-Vis-NIR (170nm – 2100nm)
  • Electrodeless operation
       - Long life and low cost of ownership

Industry  Applications

  • Semiconductor Metrology & Inspection
  • Monochromator Source
  • UV-Vis-NIR Spectroscopy
  • Photoemission Electron Microscopy (PEEM)
  • Materials Characterization
  • Advanced Imaging
  • Thin-Film Measurements




The Technology Behind LDLS™

Researchers using light for imaging and analytical spectroscopy in a variety of applications in the life sciences and materials sciences need light sources capable of providing extremely high brightness across a broad wavelength range. Traditionally, multiple lamps (Tungsten/Halogen, Xenon-arc, Deuterium) have been used to cover this broad spectral range. However, combining multiple lamps is costly and optically inefficient, and the use of electrodes within these lamps limits their ability to achieve the high brightness or power needed for the most demanding applications. Furthermore, traditional electrode-driven light sources have short life, need to be changed frequently, and during their life the lamp output declines constantly. To address this problem, Energetiq has developed a revolutionary single-light source technology called the LDLS™ Laser-Driven Light Source that enables extreme high brightness over a broad spectral range, from 170nm through visible and beyond, combined with lifetimes an order of magnitude longer than traditional lamps.


Energetiq's innovative LDLS technology uses a CW laser to directly heat a Xenon plasma to the high temperatures necessary for efficient deep ultraviolet production. In traditional approaches such as arc and deuterium lamps, the brightness, UV power, and lamp lifetime are limited by the use of electrodes to couple power to the plasma. The electrodeless LDLS technology creates small, high brightness plasma that allows efficient light collection, broad spectral range from the deepest UV through visible and beyond, and long lamp life.

Lasor Symbol

*Patent Numbers:
US: 7435982; 7786455; 7989786; 8309943; 9048000; 9185786
Japan: 5410958; 5628253
Korea: 10-1507617
UK: GB2450045