EUV Selection Guide

Our unique Electrodeless Z-Pinch™ EUV Sources are optimized for peak power and performance. To determine which of our products pairs best with your application, review our product selection guide to compare specifications.

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Properties

EQ-10R EQ-10R-HP EQ-10HR EQ-10R-SXR

Wavelength Range

170 nm – 2500 nm
190 nm – 2500 nm
170 nm - 2500 nm
170 nm - 2500 nm

Plasma Size (Typical)

100µm X 180 µm
100 µm X 180 µm
125 µm x 320 µm
370 µm x 800 µm

Numerical Aperture

0.47NA
Output fiber: 0.22NA
0.5 NA
0.5 NA

Lifetime (hours between bulb changes)

10,000 hours
10,000 hours
10,000 hours
10,000 hours

Distance of Plasma from Ouput Window*

28.00 mm
N/A
18.00 mm
28.00 mm

Optical Interface

Diverging beam
Fiber coupled output
Diverging beam with retroreflector
Diverging beam with retroreflector

Laser Class

Class 1
(IEC 60825-1: 2014)
Class 1
(IEC 60825-1: 2014)
Class 1
(IEC 60825-1: 2014)
Class 4
(IEC 60825-1: 2014)

*Average

Typical Performance

EQ-10R EQ-10R-HP EQ-10HR EQ-10R-SXR

Spectral Radiance at 500 nm

25 mW/mm2.sr.nm
N/A
75 mW/mm2.sr.nm
110 mW/mm2.sr.nm

Broadband Optical Power*

0.75 W
95 mW**
2.75 W
15 W

*Measured with thermopile; **UVFIBERX-230 fiber optic cable