EUV Selection Guide

Our unique Electrodeless Z-Pinch™ EUV Sources are optimized for peak power and performance. To determine which of our products pairs best with your application, review our product selection guide to compare specifications and fill out the form on this page to discuss with a product expert.

 

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Properties

EQ-10R EQ-10R-HP EQ-10R-SXR

Typical Output Power

10 W*
20 W*
400 mW

Typical Brightness

5 W/mm².sr
8 W/mm².sr
N/A

Pulse Rate

Up to 2 kHz
Up to 2.5 kHz
Up to 2 kHz

Target Gas

Xenon
Xenon
Nitrogen

Applications

EUV Research & Development
EUV Metrology
EUV Microscopy
Materials Research
Water-Window Microsopy
Optics Testing

*Power into 2π steradians (13.5nm ±1% bandwidth).✝Power into 2π steradians (2.8nm line emission).

Note: Performance measures in this Selection Guide are typical values for guidance in the selection and use of the EQ-10 Series products. They are not to be taken as specifications. Please Contact Energetiq for further details: info@energetiq.com.