News

Read about our latest announcements, product launch information and event schedule.

Energetiq Introduces High Repetition Rate EUV Light Source

10 kHz Source Enables High Volume Manufacturing (HVM) Simulation

Read More

Energetiq Technology Secures Series C Financing Proceeds to Advance Development of Novel Short-Wavelength Light Sources

Woburn, MA – January 6, 2009– Energetiq Technology, Inc., a developer and manufacturer of specialized short-wavelength light products for advanced technology applications, today..

Read More

Energetiq Technology Receives Semiconductor International Editors Choice Best Product Award

Company recognized for manufacturing excellence in EUV Light Source Technology

Read More

Energetiq’s Laser-Driven Light Source Technology Enables Continuous Spectrum Light Sources, from Visible to Deep Ultraviolet

Woburn, MA – June 17, 2008 – Energetiq Technology, Inc., a developer and manufacturer of specialized short-wavelength light products for advanced technology applications, has..

Read More

Energetiq EUV Light Source Installed on CEA-Leti Research Tool

Electrodeless Z-Pinch EUV System Used in Photoresist Outgassing Studies

Read More

EUV Technology Integrates Energetiq EUV Source into New Tool for EUV Resist Outgassing and Reflectivity Measurements

Martinez, CA – February 26, 2007 – EUV Technology, has developed a tool for screening candidate EUV resist formulations for possible use in other EUV tools. The tool is integrated..

Read More