Answers to Your Top EUV Questions
We’re here to help answer all of your questions regarding our EQ-10 Series of EUV light sources. While the data below is based on typical values, we’re happy to provide more detailed specifications. Select a topic below to jump to the common questions we receive on that subject.
What applications is the EQ-10 Series best suited for?
The EQ‑10 Series is widely used in semiconductor inspection, optical metrology, scientific research, and advanced materials development.
Can the EQ-10 Series spectrum be tuned for different applications?
Yes. The spectral output can be adjusted by selecting different gases and using optical elements such as zirconium foils or multilayer mirrors.
Can the EQ-10 Series be customized for specific applications or setups?
Yes. Customization options include dome design, system configuration, and integration with specialized optics or beamlines.
Can the EQ-10 Series be integrated with custom beamlines or optical setups?
Yes. The EQ‑10 Series is designed for flexible integration with external optics and beamline configurations.
What is the difference between the models in the EQ-10 Series?
The EQ‑10 Series includes several EUV and soft X‑ray light sources built on Energetiq’s Electrodeless Z‑Pinch plasma technology. Each model is optimized for different performance levels and application needs.
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EQS‑10 – A next‑generation EUV source delivering up to 40 W at 13.5 nm (±1%) and repetition rates up to 5 kHz. Ideal for EUV metrology, photoresist development, and applications requiring high brightness and throughput.
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EQ‑10R – A stable, reliable EUV source providing 10 W‑class performance for general EUV R&D, inspection, and materials research. Designed for long‑term stability and repeatability.
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EQ‑10R‑HP – A high‑brightness model offering 20 W EUV output and 8 W/mm²·sr brightness, suitable for metrology, testing, and applications requiring higher photon flux. Operates up to 2.5 kHz.
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EQ‑10R‑SXR – A soft X‑ray variant optimized for water‑window microscopy and materials imaging, producing ~400 mW at 2.8 nm.
In short: Choose EQS‑10 for maximum power and speed. Choose EQ‑10R‑HP for high brightness and metrology. Choose EQ‑10R for stable, general‑purpose EUV research. Choose EQ‑10R‑SXR for soft X‑ray imaging applications.
What EUV wavelength range does the EQ-10 Series operate in?
The EQ‑10 Series is optimized around 13.5 nm, with a typical spectral output from 8 to 15 nm depending on configuration.
Can the EUV output be shaped or directed for specific use cases?
Yes. The EUV beam can be collimated or directed using appropriate optics and alignment tools.
Why is the EQ-10 Series considered a cost effective EUV solution?
It provides a strong balance of performance, reliability, and low operating cost, making it suitable for both research and industrial environments.
What type of gas does the EQ-10 Series use to generate EUV light?
Xenon is the primary gas used, with the option to explore other gases for different spectral outputs.
How much xenon does the EQ-10 Series typically consume?
Typical xenon consumption is 8–10 sccm for peak performance, with a programmable range of 2–20 sccm depending on application.
Can different gases be used to achieve different EUV outputs?
Yes. Alternative gases may be used to modify the spectral output for specialized applications.
How easy is it to switch gases in the EQ-10 Series?
Gas switching is possible with proper procedures. Some hardware or recipe adjustments may be required.
What is the maximum pulse rate of the EQ-10 Series?
Systems in the EQ‑10 Series can operate up to 2.5 kHz, with typical operation around 2000 pulses per second.
What factors influence the performance of the EQ-10 Series?
Key parameters include voltage, repetition rate, pressure, and system configuration.
How long does the bore last under typical operating conditions?
The bore typically lasts around 1 billion pulses for peak performance, with extended use possible depending on requirements.
What kind of maintenance does the EQ-10 Series require?
Routine maintenance includes bore replacement, xenon refills, and inspection of optical components.
What consumables are required to operate the EQ-10 Series?
Main consumables include xenon gas, bore components, and optical filters such as zirconium foils.
Are there additional consumables users should plan for?
Beyond xenon, users should plan for bores and optical elements depending on usage intensity.
Can customers perform routine maintenance themselves?
Yes. Customers can perform tasks such as bore replacement using the provided tools and training.
What are the facility and space requirements for installing the EQ-10 Series?
Installation typically requires a footprint of approximately 13 ft × 12 ft, along with appropriate power and cooling infrastructure.
What are the electrical power requirements for the EQ-10 Series?
Systems operate on 208 V, 3‑phase power, with typical consumption around 10 kW.
Does the EQ-10 Series require vibration controlled installation conditions?
For optimal performance, the system should be installed on a stable, vibration‑dampened platform.
How does the EQ-10 Series isolate the EUV source from the beamline?
The system uses differential pressure and separate vacuum stacks to isolate the source from the beamline.
Does the EQ-10 Series exhaust require special handling or filtration?
Standard lab exhaust is typically sufficient. Filters may be added for additional safety if desired.
What maintenance is required during long-term storage of the EQ-10 Series?
Minimal maintenance is needed. Periodic vacuum checks or pump‑down cycles are recommended to maintain readiness.
What warranty coverage is provided with the EQ-10 Series?
The EQ‑10 Series includes a standard one‑year warranty covering parts and labor, with extended options available.
Still have questions?
Our experts are here to help you choose the right light source or talk through customizations.
