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Broadband and EUV Light Sources for Semiconductor Metrology

Energetiq light sources improve semiconductor and thin film manufacturing processes, enabling the next generation of devices.

Scale Up & Meet Demand

New: EQX-850 Broadband Light Source

Our next-generation Laser-Driven Light Source enables faster, more precise measurements with higher radiance, stability and smart features. 

New: EQS-10 Z-Pinch EUV Source

Our next-gen Electrodeless Z-Pinch™ Source has higher power output, optimized stability, and a user-friendly design, enabling precise and efficient metrology.

Learn about the EQS-10

Advanced Illumination Solutions

Chromatiq Spectral Engine™ (CSE)

Sophisticated light source capable of matching real-world lighting conditions or programmed spectra.

Explore CSE

Laser-Driven Light Sources (LDLS®)

Extremely bright for efficient light collection from the deepest UV to beyond the visible spectrum.

Product Options

Tunable Light Sources (LDTLS®)

Precise tuning across the spectral range from 200 nm – 1700 nm. A compact, fully integrated broadband source with high stability and reliability.

LDTLS Products

EUV Light Sources

Compact, high brightness, and reliable Electrodeless Z-Pinch™ technology for producing extreme UV and soft x-ray light.

Product Specs

Patented Ultra-Bright Laser-Driven Light Source and EUV Technologies

At Energetiq, we live in the extreme. As innovators of ultra-bright light sources, we close the gap between leading edge research and commercialized technologies. 

Our engineer-to-engineer relationships, backed by Hamamatsu's global sales and service, solve demanding performance challenges in semiconductor manufacturing, sensor testing, research and materials characterization for life sciences, food safety, and gas analysis.

Your exacting system demands are our top priority.

We thrive in working together through the challenges of high brightness, high throughput, and reliable performance in complex imaging systems. Look to Energetiq for the performance, technical maturity, and reliability to meet your high throughput demands.  

High brightness

Pushing the Boundaries of Optical Performance

Experts in extremely bright light sources

Covering the range from soft x-ray to infrared, our light products generate high brightness across a broad spectral range.

See Our Technologies

Advancing scientific development

Our engineered solutions illuminate nanoscale architectures with extreme specificity and granularity across the spectrum. 

Explore Our Innovations

Customized solutions for OEM

From concept to delivery, we work closely with you to develop the exact light source that meets your system's specifications.

Partner with an Expert

Our parent company, Hamamatsu, provides local sales, service, and support to our global customers. Their worldwide presence helps ensure responsive and expert support for the selection, integration, and service of Energetiq light sources. Visit Hamamatsu or find your local rep.