High-Resolution Spectral Domain OCT

Superior depth Resolution

Energetiq’s High Resolution Spectral Domain OCT (HR SD-OCT) technology uses shorter wavelengths over a broader wavelength range to offer higher depth measurement resolution than traditional OCT. The HR SD-OCT system includes a patented all-reflective, self-referenced architecture, designed for robust performance in the production environment.

Detection of subsurface defects in semiconductor and optical materials

HR SD-OCT is still in development, but a prototype system has demonstrated high-resolution detection and measurement of subsurface defects in glass substrates, adjacent to through-glass vias (TGVs), in high bandwidth semiconductor materials, and in optical lenses.

Increased yield and improved reliability

The types of defects identified by HR SD-OCT are associated with reduced manufacturing yield and shortened product life. Identification of these defects early in the manufacturing process reduces costs and enables process development by linking specific defect types to failures during production and reliability issues in finished products.