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Innovators in Light

Energetiq is a developer and manufacturer of advanced light sources that enable the manufacture and analysis of nano-scale structures and products.

Laser-Driven Light Sources

Energetiq's innovative LDLS technology uses a CW laser to directly heat a Xenon plasma for efficient deep ultraviolet production.

Laser-Driven Light Sources

The Laser-Driven Tunable Light Sources (LDTLS™) are compact, fully integrated and highly stable tunable broadband light source.

Extreme Ultraviolet - Soft X-Ray

The EUV light output can be optimized for peak power or for peak brightness as required by the user.

OEM Solutions

OEM solutions for your custom applications.


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