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LDLS EQ-99 LDLS EQ-99FC EQ-1500 EQ-1000
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LDLS™ EQ-1000
High Power, High Brightness, Broadband Light Source


Features & Benefits
 

• CW laser plasma discharge
• High brightness over broadest spectral range
--- UV-Vis-NIR (170nm – 2100nm)
• Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
• High power
--- Integrated elliptical collection optic delivers power across UV-Vis-NIR spectrum
• Choice of wavelength output
• Standard optical output interface
--- User able to customize output to desired applications
• Cost-effective source of 193nm & 248nm light, without need for toxic excimer gases
• Ultra-long life

Applications
 

• Photoresist processing
• Spectroscopy
• Biological imaging
• Chemical sensing
• Optics testing
• 193nm and 248nm resist studies
• General scientific research
 

LDLS Video


The Energetiq LDLS EQ-1000 high power, high brightness light source can be configured as a broadband source for spectroscopy or general research applications. The user can, through using the standard optical output interface, select narrow bands of light for specific applications such as photoresist testing in the 193 nm or 248 nm bands. The proprietary* laser-driven bulb technology utilized in the LDLS EQ-1000 enables lifetime an order of magnitude longer than traditional lamps, such as Tungsten/Halogen, Xenon-arc, or Deuterium lamps.

* United States Patent No. US 7,435,982

EQ1000 Chart


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