Saturn™ DUV Lamp Subsystem
Electrodeless 10 kW DUV Light Source

Features & Benefits
• High Intensity 10 kW DUV Lamp
• Unique Inductive Coupling Technology
--- More short-wavelength DUV
• Electrodeless Toroidal Bulb
--- >500 mW/cm2 from 170-400nm
• Uniform Illumination of 300mm Wafer
• Low Bulb Temperature
--- Minimizes wafer heating
--- Increases process flexibility
• Fully Integrated Subsystem
--- All water cooled
--- No ozone production
--- Integrated power supply
--- Integrated DUV reflector for max. DUV output

Applications
• UV Cleaning
• Photoresist Processing
• Research

The fully integrated Saturn™ DUV (Deep Ultra Violet) Lamp Subsystem from Energetiq Technology provides maximum short-wavelength DUV light for uniform illumination across a 300mm wafer or substrate in cleaning and photoprocessing applications. Short-wavelength DUV light provides energy for thin-film and surface processes without electrical charge or heating damage.

The Saturn lamp subsystem uses a unique inductive coupling technology (Patent Pending) to drive an electrical current in a Xenon/Mercury plasma located inside an electrodeless toroidal bulb. The electrical current heats and sustains the plasma, causing a high intensity emission of DUV radiation. The unique coupling technology, in conjunction with the particular gas mixture chosen by Energetiq, leads to maximum DUV output at wavelengths down to 170nm.

The Energetiq Saturn lamp subsystem provides the highest power density available today at the lowest cost of ownership. The Saturn subsystem is a compact integrated package that features an on-board power supply, integral water cooling to avoid cleanroom-unfriendly forced-air cooling, and recirculating nitrogen cooling to eliminate toxic ozone production. In addition, the low-temperature bulb minimizes wafer or substrate heating, allowing greater process flexibility.

Download the Energetiq Saturn DUV Lamp Subsystem datasheet (PDF file)