LDLS (Laser-Driven Light Sources)

LDLS sheds light on analytical-sciences applications - December 2011

Deep ultraviolet mapping of intracellular protein and nucleic acid in femtograms per pixel - July 2011

EUV/SXR (Extreme Ultraviolet/Extreme X-Ray)

Cryogenic Soft X-Ray Nano-Tomography of Cellular Specimens in the Laboratory - NIH 2011

EUV Light Source Development to Enable Pre-Production Mask Inspection - SPIE 2011

Improvements in Pulse-to-Pulse Stability to the EQ-10 EUV Source - EUVL 2010

EUV Source Development for AIMS and Blank Inspection - SPIE 2010

Development of the Electrodeless Z-pinch Soft X-Ray Source for Water-Window Microscopy - XRM 2010

EUV Source Development at Energetiq Technology - EUVL 2009

Development of a High Pulse Rate EUV Source - SPIE 2009

EUV Source Development at Energetiq - SPIE 2008

EUV Source Development at Energetiq - EUVL 2008

Study on Photo-chemical Analysis System (VLES) - Sekiguchi - SPIE 2007

EUV Interference Lithography with Incoherent Light - Emerging Lithographic Technologies XI, 2007

Beamline Design for the Energetiq EQ-10 EUV Source - EUVL 2007

Application of the Energetiq EQ-10 EUV Light Source on Outgassing and Exposure of EUV Photoresists - SPIE 2007

Resist Outgassing and Exposure using the Energetiq EQ-10 EUV Light Source - EUVL 2006

Application of a High-Brightness EUV Source for Metrology Inspection and Resist Development - SPIE 2006

A Novel, High-Brightness Soft X-Ray Source for Microbeam Applications - 7th International Workshop Microbeam Probes 2006

A Novel, High-Brightness Electrodeless Z-PinchTM EUV Source - EUVL 2005

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