Energetiq develops and manufactures the most reliable, high-performance light sources available today. Our products cover the spectrum from Soft X-Ray (SXR), Extreme Ultraviolet (EUV), Deep Ultraviolet (DUV) through Visible and into the Infrared (IR), covering wavelengths range from 1nm to 1000nm (nanometer) and beyond. The Energetiq light sources are compact, easy-to-use, and cost-efficient.
Our Technologies
Electrodeless Laser-Driven Light Source Technology
Energetiq's innovative Laser-Driven Light Source (LDLS™) technology uses a CW laser to directly heat a Xenon plasma to the high temperatures necessary for efficient broadband light production. In traditional approaches such as arc and deuterium lamps, the brightness, UV power, and lamp lifetime are limited by the use of electrodes that couple power to the plasma. The electrodeless LDLS technology creates small, high brightness plasma that allows efficient light collection, broad spectral range from the deepest UV through visible and beyond, and long lamp life.
• Radical new technology – CW laser plasma discharge
• Superior brightness over broad spectral range
--- 170nm through visible to 1000nm, and beyond
Electrodeless Z-Pinch™ Technology
Z-pinch plasmas have been shown to be effective at producing EUV (Extreme Ultra Violet) and SXR (Soft X-Ray) light. However, all the implementations to-date have involved conducting high discharge currents into the plasma using electrodes. The contact of these electrodes with the extremely high temperature plasma (~500,000°C) required for EUV production, can cause issues of electrode erosion, electrode spitting, and even melting. These events can be sources of significant contaminating debris for any optical system connected to the light source.
Energetiq's unique technology is also based on a Z-pinch plasma, but it avoids electrodes entirely by inductively coupling the current into the plasma. The plasma in the Energetiq source is magnetically confined away from the source walls, minimizing the heat load and reducing debris.
• Unique design eliminates electrodes and electrode current
--- No electrodes – no electrode debris
• Plasma is magnetically confined away from source components
--- Reduces debris further
• Magnetic confinement offers unexcelled spatial stability
• Lower cost and complexity
