Energetiq develops and manufactures the most reliable, high-performance short-wavelength light sources available today. Our products cover the Deep Ultraviolet (DUV), Extreme Ultraviolet (EUV) and Soft X-Ray (SXR) wavelength range from 400nm to 1nm (nanometer), and are compact, easy-to-use and cost efficient.

Energetiq Technologies

Electrodeless Z-Pinch™ Technology
Z-pinch plasmas have been shown to be effective at producing EUV (Extreme Ultra Violet) and SXR (Soft X-Ray) light. However, all the implementations to-date have involved conducting high discharge currents into the plasma using electrodes. The contact of these electrodes with the extremely high temperature plasma (~500,000°C) required for EUV production, can cause issues of electrode erosion, electrode spitting, and even melting. These events can be sources of significant contaminating debris for any optical system connected to the light source.

Energetiq's unique technology is also based on a Z-pinch plasma, but it avoids electrodes entirely by inductively coupling the current into the plasma. The plasma in the Energetiq source is magnetically confined away from the source walls, minimizing the heat load and reducing debris.

• Unique design eliminates electrodes and electrode current
--- No electrodes – no electrode debris
• Plasma is magnetically confined away from source components
--- Reduces debris further
• Magnetic confinement offers unexcelled spatial stability
• Lower cost and complexity

Electrodeless Laser-Driven Light Source Technology
Energetiq's innovative Laser-Driven Light Source (LDLS™) technology uses a CW
laser to directly heat a Xenon plasma to the high temperatures necessary for
efficient deep ultraviolet production. In traditional approaches such as arc
and deuterium lamps, the brightness, UV power, and lamp lifetime are limited
by the use of electrodes to couple power to the plasma. The electrodeless
LDLS technology creates small, high brightness plasma that allows efficient
light collection, broad spectral range from the deepest UV through visible
and beyond, and long lamp life.

• Radical new technology – CW laser plasma discharge
• Superior brightness over broad spectral range
--- 170nm visible, and beyond

Electrodeless DUV Lamp Technology
Energetiq’s Saturn DUV Lamp uses a unique inductive coupling technology (Patent Pending) to drive an electrical current in a Xenon/Mercury plasma located inside an electrodeless toroidal bulb. The electrical current heats and sustains the plasma, causing a high intensity emission of DUV radiation. The unique coupling technology, in conjunction with the particular gas mixture chosen by Energetiq, leads to maximum DUV output at wavelengths down to 170nm.

• Unique Inductive Coupling Technology
--- More short-wavelength DUV
• Electrodeless Toroidal Bulb
--- Uniform Illumination of 300mm Wafer or substrates
• Low Bulb Temperature
--- Minimizes substrate heating