Energetiq Logo

labnav


  A look at the inner workings
of Energetiq's state of the art laboratory, where innovations in light are born.
 
© Copyright 2007
Energetiq Technology, Inc.
linelft
LDLS
prod
 
marg
DUV Sources -- EUV Source -- Soft X-Ray Source -- Custom Solutions -- Datasheets/Technical Papers -- Photos


LDLS™ Laser-Driven Light Source
EQ-1000 High Brightness DUV Light Source


Features & Benefits
•Revolutionary new technology – CW laser plasma discharge
• Extreme high brightness over broadest spectral range
--- 170nm through visible and beyond
•Integrated collection optics
•Compact package
•Cost-effective
•Long-life

Applications
•Photoresist processing
•Spectroscopy
•Biological imaging
•Chemical sensing
•Optics testing
•193nm and 248nm resist studies

Operation


Researchers using UV light for a variety of spectroscopy, semiconductor processing, and life science applications need light sources capable of providing extremely high brightness across a broad wavelength range. Excimer and other DUV lasers carry high purchase and operating costs. Other light sources such as arc or deuterium lamps can’t achieve the high brightness, power or broad spectral range necessary. A single UV-VIS source combining super high brightness and a broad range from visible to the deepest UV bands is now available to meet these application challenges.

chart

Building upon its expertise in high brightness EUV and DUV light source technology, Energetiq has developed a ground-breaking new technology that enables extreme high brightness light sources over a broad spectral range, from 170nm through visible and beyond. The LDLS™ Laser-Driven Light Source is embodied in the Energetiq EQ-1000, a user-friendly, compact DUV source that can be configured as a broadband source for spectroscopy or general research applications, or with a choice of wavelength output for narrow bands of light, as in 193nm and 248nm photoresist testing. Utilizing a proprietary laser-driven bulb technology* for superior brightness, the EQ-1000 LDLS Laser-Driven Light Source is the world’s first source of truly broadband DUV-VIS power.

* Patents Pending

Download the Energetiq LDLS Laser-Driven Light Source datasheet (PDF file)

vert
LDLS and Source
 
LDLS™ Laser-Driven Light Source, shown with remote power supply

Home --/-- Privacy Policy --/-- Contact