LDLS™ EQ-1000
High Power, High Brightness, Broadband Light Source

Features & Benefits
• CW laser plasma discharge
• High brightness over broadest spectral range
--- 170nm through visible and beyond
• Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
• High power
--- Integrated collection optics
• Choice of wavelength output
• Standard optical output interface
--- User able to customize output to desired applications
• Cost-effective source of 193nm & 248nm light, without need for toxic excimer gases
• Long-life

Applications
• Photoresist processing
• Spectroscopy
• Biological imaging
• Chemical sensing
• Optics testing
• 193nm and 248nm resist studies
• General scientific research

The Energetiq LDLS EQ-1000 high power, high brightness light source can be configured as a broadband source for spectroscopy or general research applications. The user can, through using the standard optical output interface, select narrow bands of light for specific applications such as photoresist testing in the 193 nm or 248 nm bands. The proprietary* laser-driven bulb technology utilized in the LDLS EQ-1000 allows for bulb brightness and lifetime that are an order of magnitude higher and longer than traditional lamps, such as Tungsten/Halogen, Xenon-arc, or Deuterium lamps.

* United States Patent No. US 7,435,982

Download the Energetiq LDLS Laser-Driven Light Source datasheet (PDF file)

Click here to read the article titled "Energetiq brings deep ultraviolet to life" in Optics and Laser Europe, (page 19), February 2009