Datasheets and Technical Papers

Datasheets (all are PDF files – double-click to download)

Energetiq LDLS Laser-Driven Light Source datasheet

Energetiq Saturn DUV Lamp Subsystem datasheet

Energetiq EQ-10 Series EUV Source datasheet

Energetiq EQ-10SX SXR Source datasheet

Technical Papers (all are PDF files – double-click to download)

Energetiq Poster Presentations from the 2007 EUVL Symposium:

Beamline Design for the Energetiq EQ-10 EUV Source (PDF file)

EUV Source Development at Energetiq Technology (PDF file)

Energetiq’s Poster Presentation “Resist Outgassing and Exposure using the Energetiq Z-Pinch EUV Light Source” from the 2006 EUVL Symposium

Download the paper "A Novel, High-Brightness Electrodless Z-Pinch Soft X-Ray Source for Microbeam Applications," presented at the 7th International Workshop: Microbeam Probes of Cellular Radiation Response, Columbia University, New York, New York, March 2006.

Energetiq’s paper given at the 2006 SPIE Advanced Lithography Conference, February 2006

Trade Press Articles

Click here to see the article titled “Nano Development Toolkit Additions” in Semiconductor International, June 15, 2007, by Paula Doe, SEMI-San Jose, CA.

Click here to see the article titled “Infrastructure Steps Closer to EUV Lithography” in Semiconductor International, September 2005, by Aaron Hand, Managing Editor of Semiconductor International